JPH048907U - - Google Patents

Info

Publication number
JPH048907U
JPH048907U JP5051790U JP5051790U JPH048907U JP H048907 U JPH048907 U JP H048907U JP 5051790 U JP5051790 U JP 5051790U JP 5051790 U JP5051790 U JP 5051790U JP H048907 U JPH048907 U JP H048907U
Authority
JP
Japan
Prior art keywords
piezoelectric element
movement mechanism
fine movement
sample
moves
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5051790U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5051790U priority Critical patent/JPH048907U/ja
Publication of JPH048907U publication Critical patent/JPH048907U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
JP5051790U 1990-05-14 1990-05-14 Pending JPH048907U (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5051790U JPH048907U (en]) 1990-05-14 1990-05-14

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5051790U JPH048907U (en]) 1990-05-14 1990-05-14

Publications (1)

Publication Number Publication Date
JPH048907U true JPH048907U (en]) 1992-01-27

Family

ID=31569133

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5051790U Pending JPH048907U (en]) 1990-05-14 1990-05-14

Country Status (1)

Country Link
JP (1) JPH048907U (en])

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